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Title: Wringing deformation and roughness aspects in optical length measurements
Authors: Titov, Alexandre
Malinovsky, Igor
Massone, Carlos Alberto
Kleinke, Maurício Urban
Dotto, Marta Elisa Rosso
Keywords: Interferometria óptica
Iluminação : desempenho
Issue Date: 2003
Citation: TITOV, Alexandre; MALINOVSKY, Igor; MASSONE, Carlos Alberto; KLEINKE, Maurício Urban; DOTTO, Marta Elisa Rosso. Wringing deformation and roughness aspects in optical length measurements. In: IMEKO WORLD CONGRESS, 17., Dubrovnik, 2003.
Abstract: Texture deformations of gauge block surfaces arising in the wringing contact between similar structures have been determined for the first time using atomic force microscopy and optical interferometry. The level of deformations is shown to be dependent on the surface structure, and for modern gauge blocks is about 3 nm, only. Using new parallax-free methods of interferometric length measurements, roughness contribution to the measurement result by optical interferometry have been measured with a few nanometer uncertainty level.
Description: 5 f. :il.
Additional Description: Trabalho apresentado no XVII IMEKO World Congress, Dubrovnik, 2003.
Document type: Trabalho apresentado em evento / Paper
Unit: Laboratório de Interferometria
Appears in Collections:DIOPT | Trabalhos apresentados em eventos

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